电磁控制微机械装置参数的研究

2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies Pub Date : 2009-11-13 DOI:10.1109/INTERNANO.2009.5335621

V. Korneyev

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引用次数: 0

摘要

正在研制的微机械装置是为控制射线在空间中的位置而设计的。该装置以1 × 2厘米大小的硅片的形式制作，由100个微镜组成。每个微镜都有一个磁偶极子形式的驱动器(发动机)。该装置由外加磁场在偶极子中产生磁矩来控制。该装置作为一个具有可变光角的衍射光栅，将反射光通量重新定向到一个衍射阶。

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Study of the parameters of micromechanical devices with electromagnetic control

The being developed micromechanical device is designed for control of the optical rays position in space. The device is made in the format of the silicon chip with sizes of 1 × 2 cm and consists of 100 micro-mirrors. Each micromirror has an actuator (an engine) in the form of a magnetic dipole. The device is controlled by an external magnetic field induces a magnetic moment in the dipoles. The device works as a diffraction grating with a variable angle of light, redirecting the reflected light flux into one of the diffraction orders.

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2009 International School and Seminar on Modern Problems of Nanoelectronics, Micro- and Nanosystem Technologies

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