用于生产车间管理的仿真和调度系统

Y. Ishii, N. Ito
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引用次数: 1

摘要

半导体制造涉及复杂的操作,包括重复使用多种类型的设备。由于在制品(WIP)晶圆的数量非常大,数以万计,运营商很难确定每个产品的优先级。特别是,如果没有信息技术(IT)的使用,在保持在制品平衡的同时,获得设备的最佳使用几乎是不可能的。我们根据操作员的专业知识定制了部分仿真/调度系统,并实施了该系统,并在我们的晶圆厂中获得了很大的改进。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Simulation and dispatching systems for production fab management
Semiconductor manufacturing involves complicated operations, including repeated use of many types of equipment. Since the number of work-in-process (WIP) wafers is very large, in the tens of thousands, it is very difficult for operators to determine the priority of each product. Especially, without the use of information technology (IT), obtaining optimum use of equipment would be a near impossibility while maintaining the WIP balance. Many studies on the application of simulation dispatching to improve semiconductor fabs have been reported We customized part of a simulation/dispatching system based on operator expertise, implemented it, and obtained great improvements in our fabs.
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