采用准分布式TFMS线路的小型化90/spl度/混合电路

2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535) Pub Date : 2004-06-06 DOI:10.1109/MWSYM.2004.1335886

T. Tanaka, K. Nishikawa, M. Aikawa

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引用次数: 5

摘要

本文介绍了一种采用准分布式TFMS线的90/spl度极小型化混合电路。在平面成型的传统MMIC中，90/spl度/支路混合等无源电路占据了很大的芯片面积。因此，强烈希望芯片面积更加小型化。为了提高集成化水平，开发了三维MMIC。在三维mmic中，易于实现蜿蜒的线路，并且可以在传输线上加载多个金属-绝缘子-金属(MIM)电容器。利用三维MMIC拓扑结构，可以方便地实现由高阻抗薄膜微带(TFMS)线和MIM电容组成的传输线。这种类型的TFMS传输线被称为“准分布薄膜微带(QD-TFMS)线”。利用QD-TFMS线实现了一个非常小的90/spl度/分支状杂化。所制备的9/spl度/枝状混合型输电线路在面积上比传统的曲线形输电线路小80%以上。

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Miniaturized 90/spl deg/ hybrid circuit using quasi-distributed TFMS line

In this paper, very miniaturized 90/spl deg/ hybrid circuit using quasi-distributed TFMS line is described. In a planar formed conventional MMIC's, the passive circuits such as 90/spl deg/ branch-line hybrid has occupied a large chip area. Therefore, it is strongly desired that the chip area is more miniaturized. For increasing integration level, the three-dimensional (3D) MMIC has been developed. In the 3D MMICs, meander-like lines are realized easily and many metal-insulator-metal (MIM) capacitors can be loaded on transmission lines. By the 3D MMIC topology, a transmission line composed of high impedance thin film microstrip (TFMS) lines and MIM capacitors are realized easily. This type TFMS transmission line is called "quasi-distributed thin film microstrip (QD-TFMS) line". A very small 90/spl deg/ branch-like hybrid using the QD-TFMS lines is realized. The fabricated 9/spl deg/ branch-like hybrid size is more than 80% smaller than that of conventional one compose of meander-like transmission lines in area.

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来源期刊

2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535)

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