利用光聚合和金属喷射沉积技术进行微加工

K. Yamaguchi
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引用次数: 5

摘要

本研究工作涉及开发一种简单实用的方法来使用不同的方法制造微机械零件。第一种方法是基于掩模的方法,其中通过图案掩模照射紫外线激光将图像转移到液体光聚合物上。然后固化光聚合物的辐照部分并使其成为高纵横比聚合物结构。在第二种方法中,使用直接聚焦的UV激光束写入产生高纵横比和三维聚合物结构。用这些方法对固化聚合物的精度进行了检验。这些方法生产出所生产形状的微机械零件。第三种方法是通过金属射流沉积形成三维微观模型。在这个实验中使用的金属是焊料。给出了三维产品、电路和功能梯度材料的实例。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Micro-machining using photo-polymerization and metal jet deposition
This research work deals with the development of a simple and practical method for manufacturing micromechanical parts using different methods. The first method is a mask-based method in which an image is transferred to a liquid photopolymer by irradiating a UV laser through a patterned mask. The irradiated portion of the photopolymer is then solidified and it becomes a high aspect ratio polymer structure. In the second method, high aspect ratio and three-dimensional polymer structures are produced using direct focused UV laser beam writing. The accuracy of the solidified polymer when using these methods is examined. These methods produce micromechanical parts of produced shapes. In the third method, three-dimensional micro models are formed by metal jet deposition. The metal used in this experiment is solder. Some examples of three-dimensional products, electric circuits and functional gradient material are shown.
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