直流磁控溅射过程中靶中毒效应对TiOx镀层形貌和相组成的影响

{"title":"直流磁控溅射过程中靶中毒效应对TiOx镀层形貌和相组成的影响","authors":"Egor Krivonozhko","doi":"10.17213/1560-3644-2022-1-66-72","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":115894,"journal":{"name":"University News. North-Caucasian Region. Technical Sciences Series","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"TARGET POISONING EFFECT DURING DC MAGNETRON SPUTTERING ON TiOx COATINGS MORPHOLOGY AND PHASE COMPOSITION\",\"authors\":\"Egor Krivonozhko\",\"doi\":\"10.17213/1560-3644-2022-1-66-72\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":115894,\"journal\":{\"name\":\"University News. North-Caucasian Region. Technical Sciences Series\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"University News. North-Caucasian Region. Technical Sciences Series\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.17213/1560-3644-2022-1-66-72\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"University News. North-Caucasian Region. Technical Sciences Series","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.17213/1560-3644-2022-1-66-72","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}