高温工作在1- xalxsb红外焦平面

Yanqiu Lyu, J. Si, X. Cao, Liang Zhang, Z. Peng, Jiaxin Ding, G. Yao, Xiaolei Zhang, Valeriy Reobrazhenskiy
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引用次数: 2

摘要

本文提出了一种基于低铝成分In1-xAlxSb的高温工作中波长128×128红外焦平面阵列(FPA)。采用MBE技术在InSb(100)衬底上生长了InAlSb材料,XRD和AFM分析证实了这一点。我们设计并种植了两个有和没有屏障的结构。探测器像素采用传统PIN结构,尺寸为50μmx50μm。该器件的制造工艺包括台面蚀刻、钝化、金属化和带有读出集成电路(ROIC)的倒装芯片杂交、环氧回填、覆膜和抛光。当温度升高到80K以上时,二极管的电阻、成像、NETD和可操作性结果都得到了改善,从而降低了二极管的漏电流。这些措施包括添加一个薄的InAlSb区域以减少p接触泄漏电流,以及用InAlSb构建整个器件以减少探测器有源区域的热产生。温度增加到110K,同时保持完整的80K性能,实现。测量了不同温度下的I-V曲线。在110K下测量了fpa的量子效率、像素可操作性、非均匀性和平均NETD值。这给冷却系统带来了巨大的好处,包括,例如,在焦耳-汤姆逊冷却器中使用氩气,或者增加斯特林发动机的使用寿命和/或降低成本、功耗和冷却时间,减少了几十个百分点。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
High temperature operation In1-xAlxSb infrared focal plane
A high temperature operation mid-wavelength 128×128 infrared focal plane arrays (FPA) based on low Al component In1-xAlxSb was presented in this work. InAlSb materials were grown on InSb (100) substrates using MBE technology, which was confirmed by XRD and AFM analyses. We have designed and grown two structures with and without barrier. The pixel of the detector had a conventional PIN structure with a size of 50μmx50μm. The device fabrication process consisted of mesa etching, passivation, metallization and flip-chip hybridization with readout integrated circuit (ROIC), epoxy backfill, lap and polish. Diode resistance, imaging, NETD and operability results are presented for a progression of structures that reduce the diode leakage current as the temperature is raised above 80K. These include addition of a thin region of InAlSb to reduce p-contact leakage current, and construction of the whole device from InAlSb to reduce thermal generation in the active region of the detector. An increase in temperature to 110K, whilst maintaining full 80K performance, is achieved. The I-V curves were measured at different temperature. Quantum efficiency, pixel operability, non-uniformity, and the mean NETD values of the FPAs were measured at 110K. This gives the prospect of significant benefits for the cooling systems, including, for example, use of argon in Joule-Thomson coolers or an increase in the life and/or decrease in the cost, power consumption and cool-down time of Stirling engines by several tens of percent.
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