SOI波导用二维聚焦光栅耦合器

2020 Opto-Electronics and Communications Conference (OECC) Pub Date : 2020-10-04 DOI:10.1109/OECC48412.2020.9273557

Chihchi Chang, Yi-Jang Hsu, Hsaunming Kuo, S. Hsu, Y. Lai

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引用次数: 0

摘要

我们设计了一种紧凑的聚焦二维光栅耦合器，该耦合器由70 nm的浅蚀刻和160 nm的多晶硅覆盖层组成，用于光纤和220 nm绝缘体上硅(SOI)波导之间的耦合。随着多晶硅圆柱体的加入，最大耦合效率提高，在1550 nm波长处平均耦合效率为44.4% (-3.52 dB)。与标准的非聚焦光栅结构相比，该聚焦光栅结构具有减小尺寸的优点。

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Two-dimensional focusing grating couplers for SOI waveguides

We have designed a compact focusing two dimensional grating coupler which consist of 70 nm shallow etch and 160 nm poly-silicon overlay for coupling between the optical fiber and 220 nm silicon-on-insulator (SOI) waveguides. The maximum coupling efficiency is increased with the added poly-silicon cylinders, reaching a mean coupling efficiency of 44.4% (-3.52 dB) at 1550 nm wavelength. The focusing grating structure exhibits excellent size reduction advantages when compared to the standard nonfocusing grating structure.

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来源期刊

2020 Opto-Electronics and Communications Conference (OECC)

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