脉冲激光烧蚀法合成纳米粉体及其等离子体诊断

K. Yatsui, Weihua Jiang, K. Nishiura, T. Yukawa, C. Grigoriu, I. Chis, A. Marcu, D. Miu
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引用次数: 0

摘要

采用脉冲激光烧蚀法制备了纳米AlN粉体。目标可以是Al或AlN,环境气体为氮气。对于Al靶,典型的粉末直径在2.5 / 25nm范围内。为了研究粉末的形成过程,我们利用高速摄像机和时间分辨光谱分析系统研究了烧蚀等离子体的行为和等离子体中的离子种类。在诊断实验中,靶材为Al,环境气体为氧气。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Synthesis of nanosize powders by pulsed laser ablation and related plasma diagnostics
Nanosize powders of AlN was successfully synthesized by pulsed laser ablation. The target can be either Al or AlN, with ambient gas nitrogen. With Al targets, typical powder diameters were in the range of 2.5 divided by 25 nm. In order to study the process of powder formation, we have used a high-speed camera and a time-resolved spectrum analyzing system to investigate the behavior of the ablation plasma and the ion species in the plasma. For the diagnostic experiments, the target was Al and the ambient gas was oxygen.
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