可靠性测试期间腐蚀机制的过度加速:一种将有偏差的HAST测试与铜线产品的应用条件联系起来的方法

J. Zaal, A. Mavinkurve, R. Rongen, J. Janssen, P. Drummen
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引用次数: 8

摘要

铜键合线在微电子领域具有巨大的潜力,但也存在一些挑战。可靠性测试中的加速因素或失效机制与金线粘合有些不同,使用不变但未经验证的测试条件和持续时间要求,可能导致不合理的故障。使用铜线技术,与金线连接的金属间化合物(IMC)相比,在键合球和键合垫之间形成的金属间化合物(IMC)的成分和腐蚀行为发生了变化。当暴露在高温、高湿度和高偏压下时,这三种不同的应力因素加起来会产生非常高的加速度因素。当产品或材料系统在此测试中失败时,问题出现了加速因子实际是什么,以及该测试如何与温度也可能显著上升而高湿度水平可能仍然存在并且施加偏差的应用条件进行比较。这可能是在长时间处于关闭或备用阶段后的操作启动阶段。由于内部产生热量,产品会突然升温,但包装中可能仍存在水分。结合高偏置电压,这可能导致在HAST测试中看到的情况。为了对应用和试验进行比较,收集了几种成型化合物的水分特性随温度的函数。然后将该数据与应用中产品的热瞬态模拟结合使用,以比较使用条件下的实际湿度水平与测试中的湿度水平。模拟结果表明,在实际应用中,这种测试条件从未出现过,而且由于过高的含水率,测试条件会出现不现实的加速。将提出和讨论不那么极端的条件。最后用实际腐蚀数据验证了仿真结果的有效性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Over-acceleration of corrosion mechanisms during reliability testing: A method to relate biased HAST tests and application conditions for Cu wire products
Cu bond wires in microelectronics have great potential but also provides several challenges. The acceleration factors or failure mechanisms in reliability tests are somewhat different with respect to gold wire bonding which, using unchanged but not validated test conditions and duration requirements, may lead to non-justified failures. With copper wire technology, the intermetallic compounds (IMC's) that form between the bond ball and the bond pad change in composition and corrosion behavior when compared to the gold wirebonding IMC's. When exposed to high temperatures, high moisture levels and high bias, these three different stress factors can add up to very high acceleration factors. When a product or material system fails in this test the question arises what the acceleration factor actually is and how this test compares to application conditions where temperatures may also rise significantly while high humidity levels may still be present and bias is applied. This could the operational startup phase after a long time of being in off or standby stage. The product will suddenly heat up due to the internal heat generation but moisture might still be present in the package. Combined with a high bias voltage this could lead to conditions as seen in the HAST test. To make a comparison between application and test, data was collected on the moisture properties of several molding compounds as a function of temperature. This data was then used in combination with thermal transient simulations of a product in application to compare actual moisture levels under use conditions to moisture levels in test. The simulation shows that the HAST test condition never occurs in the actual application and that the test condition is unrealistically accelerating due to the very high moisture loading. Less extreme conditions will be proposed and discussed. Finally some actual corrosion data will be shown that proof the validity of the simulation results.
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