锆钛酸铅压电陶瓷材料对MEMS压电驱动夹层悬臂梁挠度的影响

2017 4th IEEE Uttar Pradesh Section International Conference on Electrical, Computer and Electronics (UPCON) Pub Date : 2017-10-01 DOI:10.1109/UPCON.2017.8251079

S. Sakib, Amit Md. EstiaqueArefin, R. Mursalin, Naim-Ul-Hasan

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引用次数: 0

摘要

采用八种常用的锆钛酸铅(PZT)压电陶瓷材料，研究了基于微机电系统(MEMS)的压电驱动夹层悬臂梁的挠度。仿真是在COMSOL多物理环境下进行的。对于某一模型的研究，PZT-8的最小叶尖挠度为38.074 nm, PZT-5H的最大叶尖挠度为82.965 nm。

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Effect of lead zirconate titanate piezoceramic material on the deflection of MEMS based sandwiched cantilever beamfor piezoelectric actuation

This paper investigates the deflection of micro-electro-mechanical system (MEMS) based sandwiched cantilever beam for piezoelectric actuation using eight of the popular lead zirconatetitanate (PZT)piezoceramic material. The simulation for the investigation was carried away in COMSOL multiphysicssoftware environment. For the investigation of a certain model, the lowest tip deflection is found to be 38.074 nm for PZT-8 and the highest tip deflection is found to be 82.965 nm for PZT-5H.

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来源期刊

2017 4th IEEE Uttar Pradesh Section International Conference on Electrical, Computer and Electronics (UPCON)

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