溶胶-凝胶法增强ZnO薄膜的光子结构

Sanjeev Kumar, A. Kapoor, F. Singh
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引用次数: 0

摘要

采用溶胶-凝胶自旋镀膜技术在玻璃衬底上生长氧化锌薄膜。所制备的薄膜在450℃下退火。x射线衍射表明ZnO薄膜为(002)优先取向的多晶。通过原子力显微镜,我们发现表面粗糙度最小(12.4 nm)。通过紫外可见光谱分析,发现其光学带隙为3.12±0.01 eV。并对该薄膜的导波性能进行了研究。结果表明,该薄膜在632.8 nm处为单模态,传输光损耗约为1.6 dB/cm。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Structural enhancement of ZnO thin films by sol-gel process for photonic applications
Zinc oxide (ZnO) thin film is grown on glass substrate by the sol-gel spin coating technique. The prepared film annealed at 450 °C. X-ray diffraction shows that the ZnO Film is polycrystalline with (002) preferential orientation. We have found the Surface roughness was minimum (12.4 nm) by atomic force microscopy. The optical band gap is found to be 3.12±0.01 eV by UV-visible Spectroscopy. The Wave guiding properties of the thin film has been also studied. The results indicate that our film is monomode at 632.8 nm with propagation optical loss estimated around 1.6 dB/cm.
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