{"title":"基于标准CMOS工艺的浮栅振动传感器","authors":"T. Yu, B. Peng, Fengqi Yu","doi":"10.1109/ICDMA.2013.394","DOIUrl":null,"url":null,"abstract":"A vibration sensor with floating gate based on standard CMOS and post-CMOS processes is presented. The vibrating membrane is released with one simple metal sacrificial layer removal step, which is very cost-efficient and fully CMOS compatible, enabling monolithic integration of circuitry. Test results show that the proposed sensor can work properly, and have good frequency linearity with the test shaking system, which exhibits prefect linearity up to 99.94%.","PeriodicalId":403312,"journal":{"name":"2013 Fourth International Conference on Digital Manufacturing & Automation","volume":"56 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-06-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Vibration Sensor with Floating Gate Based on Standard CMOS Process\",\"authors\":\"T. Yu, B. Peng, Fengqi Yu\",\"doi\":\"10.1109/ICDMA.2013.394\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A vibration sensor with floating gate based on standard CMOS and post-CMOS processes is presented. The vibrating membrane is released with one simple metal sacrificial layer removal step, which is very cost-efficient and fully CMOS compatible, enabling monolithic integration of circuitry. Test results show that the proposed sensor can work properly, and have good frequency linearity with the test shaking system, which exhibits prefect linearity up to 99.94%.\",\"PeriodicalId\":403312,\"journal\":{\"name\":\"2013 Fourth International Conference on Digital Manufacturing & Automation\",\"volume\":\"56 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-06-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 Fourth International Conference on Digital Manufacturing & Automation\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICDMA.2013.394\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 Fourth International Conference on Digital Manufacturing & Automation","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICDMA.2013.394","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Vibration Sensor with Floating Gate Based on Standard CMOS Process
A vibration sensor with floating gate based on standard CMOS and post-CMOS processes is presented. The vibrating membrane is released with one simple metal sacrificial layer removal step, which is very cost-efficient and fully CMOS compatible, enabling monolithic integration of circuitry. Test results show that the proposed sensor can work properly, and have good frequency linearity with the test shaking system, which exhibits prefect linearity up to 99.94%.
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