Characterization of guided modes excited by periodically poled transducers on Si

In this paper, we present new results on the development of piezoelectric transducers based on periodically poled ferroelectric domains on lithium niobate. The fabrication of test devices operating in the range 17-665 MHz has been achieved on 3" 500 mum thick wafers. These devices have been bonded on silicon and lapped down to a few tens of microns. Guided elliptic as well as partially guided longitudinal modes are excited, yielding phase velocity of about 3800 and 7000 m.s-1 respectively. The experimental responses are compared to the theoretical results. Finally, the temperature coefficients of frequency are measured and simulated by introducing temperature variations in our FEA/BEM code showing a good agreement between both results.