{"title":"基于inp的hemt:现状和潜力","authors":"U. Mishra, J. Shealy","doi":"10.1109/ICIPRM.1994.328148","DOIUrl":null,"url":null,"abstract":"InP based HEMT technology has evolved from research in a few labs into the mainstream of high speed microwave and millimeter wave circuits. InP HEMTs produce lower noise figures, higher gain, and higher cut-off frequencies in comparison to the best GaAs based FETs. Recent improvement in the performance of the GaInAs-channel HEMT may be attributed to: (i) obtaining superior transport properties in higher In mole-fraction channels; (ii) reducing parasitic resistance by self-aligning the ohmic contacts to the gate; and (iii) reducing the gate-length while maintaining a high aspect ratio. These efforts combined have led to a successful fabrication of ultrafast 0.1 /spl mu/m gate-length HEMTs in the late 80's to present state-of-the-art 0.05 /spl mu/m gate-lengths in the early 90's. Consequently, they are now the most promising candidate for low noise amplifiers, millimeter wave power amplification, broadband distributed amplifiers, and high frequency oscillator circuits. A review of the low noise performance is presented along with recent diversification in the InP based HEMT technology to microwave and millimeter wave power amplification.<<ETX>>","PeriodicalId":161711,"journal":{"name":"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1994-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"20","resultStr":"{\"title\":\"InP-based HEMTs: status and potential\",\"authors\":\"U. Mishra, J. Shealy\",\"doi\":\"10.1109/ICIPRM.1994.328148\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"InP based HEMT technology has evolved from research in a few labs into the mainstream of high speed microwave and millimeter wave circuits. InP HEMTs produce lower noise figures, higher gain, and higher cut-off frequencies in comparison to the best GaAs based FETs. Recent improvement in the performance of the GaInAs-channel HEMT may be attributed to: (i) obtaining superior transport properties in higher In mole-fraction channels; (ii) reducing parasitic resistance by self-aligning the ohmic contacts to the gate; and (iii) reducing the gate-length while maintaining a high aspect ratio. These efforts combined have led to a successful fabrication of ultrafast 0.1 /spl mu/m gate-length HEMTs in the late 80's to present state-of-the-art 0.05 /spl mu/m gate-lengths in the early 90's. Consequently, they are now the most promising candidate for low noise amplifiers, millimeter wave power amplification, broadband distributed amplifiers, and high frequency oscillator circuits. A review of the low noise performance is presented along with recent diversification in the InP based HEMT technology to microwave and millimeter wave power amplification.<<ETX>>\",\"PeriodicalId\":161711,\"journal\":{\"name\":\"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)\",\"volume\":\"7 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1994-03-27\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"20\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICIPRM.1994.328148\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of 1994 IEEE 6th International Conference on Indium Phosphide and Related Materials (IPRM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICIPRM.1994.328148","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
InP based HEMT technology has evolved from research in a few labs into the mainstream of high speed microwave and millimeter wave circuits. InP HEMTs produce lower noise figures, higher gain, and higher cut-off frequencies in comparison to the best GaAs based FETs. Recent improvement in the performance of the GaInAs-channel HEMT may be attributed to: (i) obtaining superior transport properties in higher In mole-fraction channels; (ii) reducing parasitic resistance by self-aligning the ohmic contacts to the gate; and (iii) reducing the gate-length while maintaining a high aspect ratio. These efforts combined have led to a successful fabrication of ultrafast 0.1 /spl mu/m gate-length HEMTs in the late 80's to present state-of-the-art 0.05 /spl mu/m gate-lengths in the early 90's. Consequently, they are now the most promising candidate for low noise amplifiers, millimeter wave power amplification, broadband distributed amplifiers, and high frequency oscillator circuits. A review of the low noise performance is presented along with recent diversification in the InP based HEMT technology to microwave and millimeter wave power amplification.<>