单壁碳纳米管场效应晶体管的大规模组装

2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI:10.1109/3M-NANO.2012.6472967

Ke Xu, Chengdong Wu, Xiaojun Tian, Haibo Yu, Z. Dong

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引用次数: 0

摘要

本文以典型的纳米器件——swcnts场效应管的组装与制造为例，面对纳米器件的大规模组装与制造，进行了实验研究。SWCNTs场效应管的组装方法采用浮电位和介电原理。在不到每平方厘米的地方组装了600个设备。实验结果表明，实现了大规模组装，达到了理想的SWCNTs场效应管组装成功率。

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Large-scale assembly of single-walled carbon nanotube field effect transistor

This paper is to the assembly and fabrication for typical nano device-SWCNT FET for example, facing the large-scale assembly and fabrication for nano devices, and carrying out the experimental research. Assembly method of SWCNTs FET is by floating potential and dielectrophoresis principle. Six hundred devices were assembled less than per square centimeter. The experimental results showed that large-scale assembly was realized, and the success rate of ideal assembly for SWCNTs FET is achieved.

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2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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