光电探测器光谱响应的TCAD仿真

IEEE/LEOS 3rd International Conference on Numerical Simulation of Semiconductor Optoelectronic Devices, 2003. Proceedings Pub Date : 2003-10-14 DOI:10.1109/NUSOD.2003.1259032

B. Jacob, M. Klemenc, C. Petit, A. Witzig, W. Fichtner

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引用次数: 6

摘要

本文通过从反射率测量数据中提取光学参数(折射率和消光系数)并将表面复合速度作为自由参数来确定光电探测器的光谱响应度。采用传输矩阵法计算器件内的光场。电学仿真采用ISE TCAD仿真包进行。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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TCAD simulation of photodetector spectral response

In this paper, the spectral responsivity of a photodetector is determined by extracting optical parameters (refractive index and extinction coefficients) from the reflectivity measurement data and by treating the surface recombination velocity as a free parameter. A transfer matrix method based model has been implemented to compute the optical fields within the device. The electrical simulation was performed using ISE TCAD simulation package.

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IEEE/LEOS 3rd International Conference on Numerical Simulation of Semiconductor Optoelectronic Devices, 2003. Proceedings

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