引线海(SoL)兼容互连技术的优化实现

B. Dang, C. Patel, H. Thacker, M. Bakir, K. Martin, J. Meindl
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引用次数: 4

摘要

兼容的互连可以使晶圆级封装具有高I/O密度,高可靠性和更好的性能,低成本和小尺寸。针对SoL兼容互连的制造工艺进行了优化,以实现高成品率,并与标准后端线(BEOL)以及倒装芯片键合工艺兼容。优化的制造工艺进一步实现了IC和SoL兼容互连之间的可靠连接,无需使用昂贵的下填充工艺。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optimal implementation of sea of leads (SoL) compliant interconnect technology
Compliant interconnects can enable wafer level packages with high I/O density, high reliability and better performances with low cost and small size. A fabrication process for SoL compliant interconnects has been optimized to achieve high yield and compatibility with standard back-end-of-line (BEOL) as well as flip-chip bonding processes. The optimized fabrication process further enables a reliable joining between the IC and SoL compliant interconnects to the next level of packaging without the use of an expensive underfilling process.
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