通过向VDD和GND线提供脉冲电压信号的CMOS-LSI开路故障检测方法

Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits Pub Date : 1997-07-21 DOI:10.1109/IPFA.1997.638123

H. Sumitomo, T. Nakamura

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引用次数: 0

摘要

提出了一种简便、快速的故障分析方法来检测CMOS-LSI的开路故障。该方法充分利用了CMOS结构和电压对比图像的特性。通过向VDD和GND提供脉冲信号，并观察电压对比图像，可以看出开路故障与LSI的其他部分不同。提出了一种图像处理系统，提高了图像的可观测性，从而减少了检测时间。

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Open fault detection method for CMOS-LSI by supplying pulsed voltage signal to VDD and GND lines

An easy and rapid failure analysis method to detect CMOS-LSI open faults has been developed. This method exploits both the properties of CMOS structure and the voltage contrast image. By supplying pulsed signal to VDD and GND, and observing the voltage contrast image, open faults appear different from the rest of the LSI. An image processing system is proposed which improves image observability and thereby decreases inspection time.

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Proceedings of the 1997 6th International Symposium on the Physical and Failure Analysis of Integrated Circuits

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