{"title":"高压硅堆击穿原因分析及器件修复","authors":"Hanmin Ye, Qianting Sun","doi":"10.1109/IAEAC.2015.7428521","DOIUrl":null,"url":null,"abstract":"This paper introduces the reason for the high voltage silicon stack broken down for the high voltage generator and the method of improvement is proposed. The machine operation shows that the method is correct.","PeriodicalId":398100,"journal":{"name":"2015 IEEE Advanced Information Technology, Electronic and Automation Control Conference (IAEAC)","volume":"45 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Analysis on reason for high voltage silicon stack breakdown and device repaired\",\"authors\":\"Hanmin Ye, Qianting Sun\",\"doi\":\"10.1109/IAEAC.2015.7428521\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper introduces the reason for the high voltage silicon stack broken down for the high voltage generator and the method of improvement is proposed. The machine operation shows that the method is correct.\",\"PeriodicalId\":398100,\"journal\":{\"name\":\"2015 IEEE Advanced Information Technology, Electronic and Automation Control Conference (IAEAC)\",\"volume\":\"45 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 IEEE Advanced Information Technology, Electronic and Automation Control Conference (IAEAC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IAEAC.2015.7428521\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE Advanced Information Technology, Electronic and Automation Control Conference (IAEAC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IAEAC.2015.7428521","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Analysis on reason for high voltage silicon stack breakdown and device repaired
This paper introduces the reason for the high voltage silicon stack broken down for the high voltage generator and the method of improvement is proposed. The machine operation shows that the method is correct.