纳米装配碳纳米管尖端压电悬臂阵列的制备与表征

2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2012-08-01 DOI:10.1109/3M-NANO.2012.6472929

Tian-Lei Zhang, Gang Zhao, J. Chu, Wenhao Huang, M. Bartenwerfer, V. Eichhorn, S. Fatikow

{"title":"纳米装配碳纳米管尖端压电悬臂阵列的制备与表征","authors":"Tian-Lei Zhang, Gang Zhao, J. Chu, Wenhao Huang, M. Bartenwerfer, V. Eichhorn, S. Fatikow","doi":"10.1109/3M-NANO.2012.6472929","DOIUrl":null,"url":null,"abstract":"Piezoelectric microcantilever transducers based on lead zirconate titanate (PZT) thin film have received considerable interest because of their wide potential applications in nanotechnology, biosensors and microelectromechanical systems. In this work a self-sensing and self-actuating PZT piezoelectric cantilever array is designed and fabricated for parallel dynamic Atomic Force Microscope (AFM) imaging. Carbon Nanotube (CNT) tips are assembled to the free end of the cantilever array by nano-handling to enhance the imaging resolution. Detailed fabrication process of the array and nano-assembly of CNT tips are reported and characterizations of mechanical properties of the array are carried out and presented in this paper.","PeriodicalId":134364,"journal":{"name":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Fabrication and characterization of piezoelectric cantilever array with nano-assembly carbon nanotube tips\",\"authors\":\"Tian-Lei Zhang, Gang Zhao, J. Chu, Wenhao Huang, M. Bartenwerfer, V. Eichhorn, S. Fatikow\",\"doi\":\"10.1109/3M-NANO.2012.6472929\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Piezoelectric microcantilever transducers based on lead zirconate titanate (PZT) thin film have received considerable interest because of their wide potential applications in nanotechnology, biosensors and microelectromechanical systems. In this work a self-sensing and self-actuating PZT piezoelectric cantilever array is designed and fabricated for parallel dynamic Atomic Force Microscope (AFM) imaging. Carbon Nanotube (CNT) tips are assembled to the free end of the cantilever array by nano-handling to enhance the imaging resolution. Detailed fabrication process of the array and nano-assembly of CNT tips are reported and characterizations of mechanical properties of the array are carried out and presented in this paper.\",\"PeriodicalId\":134364,\"journal\":{\"name\":\"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/3M-NANO.2012.6472929\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2012.6472929","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 2

摘要

基于锆钛酸铅(PZT)薄膜的压电微悬臂式换能器在纳米技术、生物传感器和微机电系统中具有广泛的应用前景，引起了人们的广泛关注。本文设计并制作了一种用于原子力显微镜(AFM)平行动态成像的自传感自驱动压电悬臂阵列。通过纳米处理将碳纳米管(CNT)尖端组装到悬臂阵列的自由端，以提高成像分辨率。本文报道了碳纳米管尖端阵列和纳米组装的详细制作过程，并对阵列的力学性能进行了表征。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Fabrication and characterization of piezoelectric cantilever array with nano-assembly carbon nanotube tips

Piezoelectric microcantilever transducers based on lead zirconate titanate (PZT) thin film have received considerable interest because of their wide potential applications in nanotechnology, biosensors and microelectromechanical systems. In this work a self-sensing and self-actuating PZT piezoelectric cantilever array is designed and fabricated for parallel dynamic Atomic Force Microscope (AFM) imaging. Carbon Nanotube (CNT) tips are assembled to the free end of the cantilever array by nano-handling to enhance the imaging resolution. Detailed fabrication process of the array and nano-assembly of CNT tips are reported and characterizations of mechanical properties of the array are carried out and presented in this paper.

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2012 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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