直流到100 GHz高性能欧姆分流开关

2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535) Pub Date : 2004-06-06 DOI:10.1109/MWSYM.2004.1338987

D. Mercier, P. Charvet, P. Berruyer, C. Zanchi, L. Lapierre, O. Vendier, J. Cazaux, P. Blondy

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引用次数: 48

摘要

提出了一种基于共面波导的宽带欧姆分流开关。该开关是用带有图案金属触点的介电膜制造的，当它被静电驱动时，该触点会缩短CPW线。这个开关是从测量中推断出来的。它具有插入损耗低、匹配性好、DC到W频带隔离度高(>20 dB至100 GHz)、开关时间<1/spl mu/s的优良力学性能。

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A DC to 100 GHz high performance ohmic shunt switch

This paper presents a wideband ohmic shunt switch implemented on a coplanar waveguide (CPW). The switch is fabricated using a dielectric membrane with patterned metallic contacts that short the CPW line when it is electrostatically actuated. The switch has been extrapolated from measurements. It exhibits low insertion loss, good matching, high isolation from DC to W band (>20 dB up to 100 GHz) and very good mechanical properties with switching time <1/spl mu/s.

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来源期刊

2004 IEEE MTT-S International Microwave Symposium Digest (IEEE Cat. No.04CH37535)

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