微热管激光辅助湿法刻蚀制备高纵横比微沟槽

2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference Pub Date : 2006-05-21 DOI:10.1109/CLEO.2006.4628599

K. Oh, M.K. Lee, S.J. Kwon, S. Jeong

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引用次数: 1

摘要

采用激光辅助湿法刻蚀技术，实现了微热管高纵横比微沟槽的加工，并具有良好的轮廓和表面质量。

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Fabrication of high-aspect-ratio microgrooves with laser-assisted wet etching for micro heat pipe

Fabrication of high-aspect-ratio microgrooves with good profile and surface quality is realized using laser-assisted wet etching technique for the application to micro heat pipe.

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来源期刊

2006 Conference on Lasers and Electro-Optics and 2006 Quantum Electronics and Laser Science Conference

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