五氧化二钽薄膜中的瞬态光电流

Proceedings of the 3rd International Conference on Conduction and Breakdown in Solid Dielectrics Pub Date : 1989-07-03 DOI:10.1109/ICSD.1989.69179

K. Miyairi

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引用次数: 0

摘要

采用光电流测量方法研究了Ta/sub 2/O/sub 5/薄膜与金属电极之间的导电机理。给出了金属/Ta/sub 2/O/sub 5/界面的性质，并推导出了能量图。在Al/Ta/sub 2/O/sub 5/界面中观察到瞬态电流随时间衰减，并解释了由于Al/sub 2/O/sub 3/界面上形成阻挡势垒而产生的空间电荷效应。

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Transient photocurrents in tantalum pentoxide films

The mechanism of conduction between a Ta/sub 2/O/sub 5/ film and a metal electrode was studied by means of photocurrent measurements. The nature of the metal/Ta/sub 2/O/sub 5/ interface is shown as well as the energy diagram deduced from the results. Transient current decaying with time has been observed in the Al/Ta/sub 2/O/sub 5/ interface and explained in terms of the space charge effect due to the blocking barrier of Al/sub 2/O/sub 3/ formed at the interface.<>

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Proceedings of the 3rd International Conference on Conduction and Breakdown in Solid Dielectrics

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