光热偏转光谱法测量衬底薄膜系统热接触电阻的可行性

J. Foley, C. Avedisian
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引用次数: 2

摘要

本文扩展了各向同性薄膜-衬底系统的光热偏转光谱理论,使其包括两种材料之间的热接触电阻和薄膜和衬底中能量的吸收。该模型被表述为一个三域系统(气体、薄膜和衬底),在各种界面处具有耦合条件,包括热接触电阻。得到了各区域温度的封闭表达式。通过比较众所周知的无限薄膜厚度、零薄膜厚度、零接触电阻和薄膜表面薄吸收层的极限,证实了对探针束挠度的分析。这些配方在NIST标准参考材料(SRM)上进行了测试,使用数值生成的光束偏转数据来提取块状材料的热扩散系数,并将两个SRM压在一起以提取热接触电阻。结果表明,利用梁挠度数据确定层状试样的热接触电阻是可行的。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The Feasibility of Using Photothermal Deflection Spectroscopy to Measure Thermal Contact Resistance in a Film on Substrate System
In this paper we extend the theory of photothermal deflection spectroscopy for an isotropic film-on-substrate system to include the thermal contact resistance between the two materials and absorption of energy in the film and substrate. The model is formulated as a three-domain system (gas, film and substrate) with coupling conditions at the various interfaces, including a thermal contact resistance. Closed form expressions are obtained for the temperatures in each domain. The analysis for probe beam deflection is confirmed by comparison to well-known limits of infinite film thickness, zero film thickness, zero contact resistance, and a thin absorbing layer at the surface of the film. The formulations are tested against NIST standard reference materials (SRM) using numerically generated beam deflection data to extract thermal diffusivity of a bulk material, and of two SRMs pressed together to extract thermal contact resistance. The results show the feasibility of using to determine the thermal contact resistance of a layered sample from beam deflection data.
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