栅极氧化物厚度和漏极偏压对45nm PMOS中NBTI降解的影响

S. Hatta, N. Soin, J. F. Zhang
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引用次数: 6

摘要

本文研究了栅极氧化结垢和漏极偏置变化对45nm PMOSFET负偏置温度不稳定性的影响。栅极氧化物厚度参数在1.8nm、2nm和3nm的范围内变化。PMOS的漏极偏压分别为50mV和1.2V,以观察其对PMOS NBTI的影响。利用Sentaurus Synopsys仿真软件(TCAD)研究了界面阱浓度、阈值电压和漏极电流对器件基本参数的影响。当栅极氧化物厚度减小时,当施加高应力温度和大负偏压时,PMOS晶体管呈现出更高的界面陷阱浓度,但表现出阈值电压位移的改善和漏极电流的较小退化。除此之外,在较高的漏极偏置下,应力晶体管将表现出显著的电流退化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
The effect of gate oxide thickness and drain bias on NBTI degradation in 45nm PMOS
This paper presents the effects of gate oxide scaling and drain bias variation on the Negative Bias Temperature Instabilities (NBTI) of a 45nm PMOSFET. The gate oxide thickness parameter is varied in this work at values of 1.8nm, 2nm and 3nm. The drain bias of the PMOS is also varied, at values 50mV and 1.2V, in order to observe its effect on the NBTI of the PMOS. The effects on the fundamental device parameters namely the interface trap concentration, threshold voltage and drain current had been studied utilizing the technology CAD (TCAD) Sentaurus Synopsys simulator. At decreasing gate oxide thickness, the PMOS transistor presents a higher interface trap concentration but exhibits improvement in the threshold voltage shift and less degradation in the drain current, when a high stress temperature and large negative bias are applied. In addition to that, the stressed transistor would exhibit significant current degradation at a higher drain bias.
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