{"title":"选择性面积分子束外延在Si(111)上生长高定向的InAs纳米线","authors":"Che-Wei Yang, Wei-Chieh Chen, Hao-Hsiung Lin","doi":"10.1109/ISNE.2016.7543314","DOIUrl":null,"url":null,"abstract":"Effects of growth conditions including V/III ratio, initial treatment and hole diameter on the selective-area MBE growth of InAs nanowires (NW) on patterned Si (111) substrates are investigated. High V/III ratio favors the axial growth of the NWs. Results from vertical yield study suggests that (111)B is an inherent preferential domain when growth InAs on non-polar (111)Si. The preference is independent of the treatments. However, As illumination before the growth could convert the (111)Si to (111)A InAs and thus decreases the vertical yield. So far, we have successfully achieved a vertical yield over 70%.","PeriodicalId":127324,"journal":{"name":"2016 5th International Symposium on Next-Generation Electronics (ISNE)","volume":"48 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-05-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Highly directional InAs nanowires grown on Si(111) by selective-area molecular-beam epitaxy\",\"authors\":\"Che-Wei Yang, Wei-Chieh Chen, Hao-Hsiung Lin\",\"doi\":\"10.1109/ISNE.2016.7543314\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Effects of growth conditions including V/III ratio, initial treatment and hole diameter on the selective-area MBE growth of InAs nanowires (NW) on patterned Si (111) substrates are investigated. High V/III ratio favors the axial growth of the NWs. Results from vertical yield study suggests that (111)B is an inherent preferential domain when growth InAs on non-polar (111)Si. The preference is independent of the treatments. However, As illumination before the growth could convert the (111)Si to (111)A InAs and thus decreases the vertical yield. So far, we have successfully achieved a vertical yield over 70%.\",\"PeriodicalId\":127324,\"journal\":{\"name\":\"2016 5th International Symposium on Next-Generation Electronics (ISNE)\",\"volume\":\"48 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2016-05-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2016 5th International Symposium on Next-Generation Electronics (ISNE)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISNE.2016.7543314\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 5th International Symposium on Next-Generation Electronics (ISNE)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISNE.2016.7543314","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Highly directional InAs nanowires grown on Si(111) by selective-area molecular-beam epitaxy
Effects of growth conditions including V/III ratio, initial treatment and hole diameter on the selective-area MBE growth of InAs nanowires (NW) on patterned Si (111) substrates are investigated. High V/III ratio favors the axial growth of the NWs. Results from vertical yield study suggests that (111)B is an inherent preferential domain when growth InAs on non-polar (111)Si. The preference is independent of the treatments. However, As illumination before the growth could convert the (111)Si to (111)A InAs and thus decreases the vertical yield. So far, we have successfully achieved a vertical yield over 70%.
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