微数字全息ptv光固化树脂光固化uv纳米压印的三维测量

2008 Second International Conference on Thermal Issues in Emerging Technologies Pub Date : 2008-12-01 DOI:10.1115/1.4001854

S. Satake, G. Sorimachi, T. Kanai, J. Taniguchi, N. Unno

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引用次数: 7

摘要

采用微型dhptv系统对双孔覆盖玻璃玻璃板内的流场进行了高时间分辨率的测量。覆盖玻璃的玻璃板在光固化树脂内部有两个孔。粒子测量在两秒内完成;测量时间包括固化时间。理论固化时间由紫外光辐照通量估算。此外，光固化树脂随温度的变化进行了测试，以评估温度的依赖性。因此，可以即时获得种子粒子的跟踪。跟踪引起的三维位移主要是由深度方向引起的。该值与紫外辐射通量的理论位移值吻合较好。此外，还发现位移的光固化与温度的升高成正比。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Three-dimensional measurements of photo curing with process with photo-curable resin for UV-nanoimprint by micro-digital-holographic-PTV

High time-resolution flow field measurement in the glass plate with covered glass with two holes is performed by micro-DHPTV system. The glass plate with covered glass has two holes that are inside photo-curable resin. The particle measurement is performed during two seconds; the measurement time is covered for curing time. The theoretically curing time is estimated from the irradiation flux of UV source. Moreover, photo-curable resin with changing of temperature is measured to evaluate dependence of temperature. Consequently, the seeding particle tracking can be obtained instantaneously. The three-dimensional displacement from the tracking is mainly caused at the depth direction. The value is in good agreement with the theoretical displacement from UV irradiation flux. Moreover, it is found that the photo curing of the displacement appears to be proportional to increasing the temperature.

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2008 Second International Conference on Thermal Issues in Emerging Technologies

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