H. Fuke, K. Saito, M. Yoshikawa, K. Koui, H. Iwasaki, M. Sahashi
{"title":"IrMn交换偏置合成反铁磁体自旋阀膜的热稳定性和可靠性","authors":"H. Fuke, K. Saito, M. Yoshikawa, K. Koui, H. Iwasaki, M. Sahashi","doi":"10.1109/INTMAG.1999.837317","DOIUrl":null,"url":null,"abstract":"ANTlFERROMAGNETANGE-BIASED BY IrMn H. N. Fukc, K. Saito, M. Yoshikawa, K. Koui, H. Iwasaki and M. Sahashi Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation, 72, Horikawa-cho, Saiwai-ku, Kawasaki 210, Japan Jntroduction An antiferromagnetic layer that plays an most impnrlant role in spin-valve has been investigated in order to obtain high thermal stability and reliability for use or spin-valve GMR heads in giga bits density magnetic recording lJ,z). We reported that Ir,Mn, exchange-coupled to CoFe shows a T, of 270% and is suitable for a narrow gap head structure that is nccdcd in order to realize more high density recording as IrMn shaws high H,, at lhinnrr layer thicknrss than ordered antiferromagnetic films as NiMn and PtMn\". However, other papers have reporled poor IrMn properties with a T. ofbelow 250'C \",\". In this study. we report the relation ktwccn lrMn crystal gram and good lrMn propertics and thc thermal stability of spin-valves with a synthetic antiferromagnet ( S y w exchange-biased by the IrMn layer. -E.&.I ' Im We believe that large KnFV is important to obtain high T. (Here, Ks is the crystal anisotropy 01 the antiferromagnetic film, and V i s the volume of the crystal grain. Namely. it is needed to make the grain size of lrMn layer grow in order lo obtain high Tw On the other hand, it was reported for CrAl antiferomagntic layer that H, is in proportion to l l D by using Malozemolf random field approximation on the assumplion that L=D ?.(Here, L is the coupling arei, and D is the grain size.) As the critical thickness for CrAl is thick, it is necessary to assume d-nD (n: cocilicienl) for lrMn with thin critical thickness. If these models are suitable, it is thought that T. increases when the grain size of IrMn layer grows lager, while H,,,dccrcascs. Figure 1 shows the grain six of lrMn layer dcpcndencc for H , , and T,. The grain size was calculatcd by using Schcrrur'a cquation from IrMn (111) XRD peak. The grain sizes were ahout equal to the lrMn layer thickness. I t was found lhal T, increases as the grain size of lrMn layer increases, while H, .decreases, and an H,, of 4WOe at R.T. and a T, o1300'C for CoFc(2nm)llrMn (10nm) spin-valves were obtained. Thermal stahilitv and reliahilitv of SvAFIlrMn spin-wilvcs The spin-valve (S.V.) film wilh a SyAF exchange-biased by the IrMn layer with high T, and high H, TalNiFelCoFelCulCoFe~ulC~~Fellr?,Mn,,(l0nm)~a, was prupared on alumina coalcd Si substrates hy DC sputtering. The IOW oxygen contcnl lrMn largcl was uscd. The lilms were annealed at 270'C for 1 -10 hours under a magnetic licld olmore Ihan 7kOe. Figure 2 shows the thermal stability fnr a reversed magnetic ticld n l 10kOe IO the pinncd layer direction. At uach temperature, it was annealed f<>r 10 minutes under the rcvcrscd m;ignclic licld. The H,.,' was defined as shown in fig.3. The pinned direction was stable ti l l about I X W C . And Ihc pinncd direction gradually changed to Ihc reversed direction a1 tcmpcralurcs i r m 201K 10 ahout 311o'C. I t is thought tu be more stahlc h r reversed magnetic liclds til l 24OT than IrMn-S.V. and PtMnS.V. with normal pinned layer. The spin-valve film wilh a SyAF exchange-biased h) Ihc lrMn layer is expccled to he strong lor ESD. Figure 4 shows thc lhcmal stahilily Ihr ii pcrpcndicular miignclic field of 2000e to pinned direclion. The time dependence of the pin dircclim 0 11 was mcasurcd ;it 200°C. SyAFllrMn spin-valve shrrws a small changc in e p u l l c s s than 4' aftcr ahnut 1110 hours even at a high temperature of200t . TEL: +81-(144-54Y-3572 FAX: t X 1 -(144-54O-l 142 Hiromi Niu Fuke Materials and Devices Rescarch hhoratnrics, Rescarch and Development Center. Toshiba Corpralinn 72, Horikawa-cho, Saiwai-ku, Kawasaki 210, Japan E-mail: hiromi.iukc~toshiba.uo.jp","PeriodicalId":425017,"journal":{"name":"IEEE International Magnetics Conference","volume":"15 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-05-18","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Thermal stability and reliability of spin-valve films with synthetic antiferromagnet exchange-biased by IrMn\",\"authors\":\"H. Fuke, K. Saito, M. Yoshikawa, K. Koui, H. Iwasaki, M. Sahashi\",\"doi\":\"10.1109/INTMAG.1999.837317\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"ANTlFERROMAGNETANGE-BIASED BY IrMn H. N. Fukc, K. Saito, M. Yoshikawa, K. Koui, H. Iwasaki and M. Sahashi Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation, 72, Horikawa-cho, Saiwai-ku, Kawasaki 210, Japan Jntroduction An antiferromagnetic layer that plays an most impnrlant role in spin-valve has been investigated in order to obtain high thermal stability and reliability for use or spin-valve GMR heads in giga bits density magnetic recording lJ,z). We reported that Ir,Mn, exchange-coupled to CoFe shows a T, of 270% and is suitable for a narrow gap head structure that is nccdcd in order to realize more high density recording as IrMn shaws high H,, at lhinnrr layer thicknrss than ordered antiferromagnetic films as NiMn and PtMn\\\". However, other papers have reporled poor IrMn properties with a T. ofbelow 250'C \\\",\\\". In this study. we report the relation ktwccn lrMn crystal gram and good lrMn propertics and thc thermal stability of spin-valves with a synthetic antiferromagnet ( S y w exchange-biased by the IrMn layer. -E.&.I ' Im We believe that large KnFV is important to obtain high T. (Here, Ks is the crystal anisotropy 01 the antiferromagnetic film, and V i s the volume of the crystal grain. Namely. it is needed to make the grain size of lrMn layer grow in order lo obtain high Tw On the other hand, it was reported for CrAl antiferomagntic layer that H, is in proportion to l l D by using Malozemolf random field approximation on the assumplion that L=D ?.(Here, L is the coupling arei, and D is the grain size.) As the critical thickness for CrAl is thick, it is necessary to assume d-nD (n: cocilicienl) for lrMn with thin critical thickness. If these models are suitable, it is thought that T. increases when the grain size of IrMn layer grows lager, while H,,,dccrcascs. Figure 1 shows the grain six of lrMn layer dcpcndencc for H , , and T,. The grain size was calculatcd by using Schcrrur'a cquation from IrMn (111) XRD peak. The grain sizes were ahout equal to the lrMn layer thickness. I t was found lhal T, increases as the grain size of lrMn layer increases, while H, .decreases, and an H,, of 4WOe at R.T. and a T, o1300'C for CoFc(2nm)llrMn (10nm) spin-valves were obtained. Thermal stahilitv and reliahilitv of SvAFIlrMn spin-wilvcs The spin-valve (S.V.) film wilh a SyAF exchange-biased by the IrMn layer with high T, and high H, TalNiFelCoFelCulCoFe~ulC~~Fellr?,Mn,,(l0nm)~a, was prupared on alumina coalcd Si substrates hy DC sputtering. The IOW oxygen contcnl lrMn largcl was uscd. The lilms were annealed at 270'C for 1 -10 hours under a magnetic licld olmore Ihan 7kOe. Figure 2 shows the thermal stability fnr a reversed magnetic ticld n l 10kOe IO the pinncd layer direction. At uach temperature, it was annealed f<>r 10 minutes under the rcvcrscd m;ignclic licld. The H,.,' was defined as shown in fig.3. The pinned direction was stable ti l l about I X W C . And Ihc pinncd direction gradually changed to Ihc reversed direction a1 tcmpcralurcs i r m 201K 10 ahout 311o'C. I t is thought tu be more stahlc h r reversed magnetic liclds til l 24OT than IrMn-S.V. and PtMnS.V. with normal pinned layer. The spin-valve film wilh a SyAF exchange-biased h) Ihc lrMn layer is expccled to he strong lor ESD. Figure 4 shows thc lhcmal stahilily Ihr ii pcrpcndicular miignclic field of 2000e to pinned direclion. The time dependence of the pin dircclim 0 11 was mcasurcd ;it 200°C. SyAFllrMn spin-valve shrrws a small changc in e p u l l c s s than 4' aftcr ahnut 1110 hours even at a high temperature of200t . TEL: +81-(144-54Y-3572 FAX: t X 1 -(144-54O-l 142 Hiromi Niu Fuke Materials and Devices Rescarch hhoratnrics, Rescarch and Development Center. Toshiba Corpralinn 72, Horikawa-cho, Saiwai-ku, Kawasaki 210, Japan E-mail: hiromi.iukc~toshiba.uo.jp\",\"PeriodicalId\":425017,\"journal\":{\"name\":\"IEEE International Magnetics Conference\",\"volume\":\"15 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-05-18\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE International Magnetics Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INTMAG.1999.837317\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE International Magnetics Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INTMAG.1999.837317","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
摘要
ANTlFERROMAGNETANGE-BIASED BY IrMn H. N. Fukc, K. Saito, M. Yoshikawa, K. Koui, H. Iwasaki和M. Sahashi材料与器件研究实验室,研究开发中心,东芝公司,72,堀川町,西野区,川崎210为了获得高热稳定性和可靠性,在千兆比特密度磁记录中使用的自旋阀GMR磁头,研究了在自旋阀中起最重要作用的反铁磁层。我们报道了Ir,Mn,与CoFe交换偶联的T值为270%,适合于窄间隙头结构,这是为了实现更高的高密度记录所必需的,因为IrMn在层厚较低的情况下比有序的反铁磁薄膜如NiMn和PtMn具有更高的H值。然而,其他论文报道了t值低于250°c的IrMn性能较差。在这项研究中。本文报道了由IrMn层交换偏置的合成反铁磁体(S y)自旋阀的热稳定性。- e强生。我们认为大的KnFV对于获得高的t很重要(其中Ks为反铁磁薄膜的晶体各向异性,V为晶粒体积)。即。另一方面,在l =D ?的假设下,利用Malozemolf随机场近似,得到了CrAl反磁层的H,与l l D成正比的结果。(其中L为耦合面积,D为晶粒尺寸。)由于CrAl的临界厚度较厚,所以对于临界厚度较薄的lrMn,需要假设d-nD (n: cocilicienl)。如果这些模型是合适的,则认为t随着IrMn层晶粒尺寸的增大而增大,而H…减小。图1显示了lrMn层对H、和T、的依赖性。根据IrMn(111)的XRD谱峰,利用Schcrrur’a方程计算了晶粒尺寸。晶粒尺寸约等于lrMn层厚度。结果表明,随着lrMn层晶粒尺寸的增大,温度t增大,而温度H减小,在室温下得到4WOe的温度H,在CoFc(2nm)llrMn (10nm)的自旋阀温度t为101300℃。采用直流溅射法制备了高T、高H、TalNiFelCoFelCulCoFe~ulC~~ felfe ~,Mn,,(10nm)~a的IrMn层具有SyAF交换偏置的自旋阀(sv)薄膜。低氧控制装置被广泛使用。将薄膜在270℃下,在7℃以上的磁场下退火1 -10小时。图2显示了沿峰值层方向110k的反磁磁场的热稳定性。在每个温度下,在室温下退火f<>r 10min。H。,定义如图3所示。钉住的方向稳定,直到大约1 X W C。在3110℃左右,其峰值方向逐渐转变为反转方向。如果它被认为是更稳定的反磁极,直到24OT比IrMn-S.V。和PtMnS.V。与正常的固定层。具有SyAF交换偏置h) Ihc lrMn层的自旋阀膜有望获得强静电放电。图4显示了在2000e至钉住方向的垂直微圈场的正常稳定性。当温度为200℃时,引脚曲线的时间依赖性不明显。SyAFllrMn型自旋阀即使在200℃高温下运行约1110小时后,其转速变化也小于4℃。电话:+81-(144-54Y-3572传真:1-(144-54o - 1142)牛福科弘美材料与器件研究中心,研发中心。日本川崎210市西外区堀川町72号东芝公司电子邮件:hiromi.iukc~ toshiba.u.jp
Thermal stability and reliability of spin-valve films with synthetic antiferromagnet exchange-biased by IrMn
ANTlFERROMAGNETANGE-BIASED BY IrMn H. N. Fukc, K. Saito, M. Yoshikawa, K. Koui, H. Iwasaki and M. Sahashi Materials and Devices Research Laboratories, Research and Development Center, Toshiba Corporation, 72, Horikawa-cho, Saiwai-ku, Kawasaki 210, Japan Jntroduction An antiferromagnetic layer that plays an most impnrlant role in spin-valve has been investigated in order to obtain high thermal stability and reliability for use or spin-valve GMR heads in giga bits density magnetic recording lJ,z). We reported that Ir,Mn, exchange-coupled to CoFe shows a T, of 270% and is suitable for a narrow gap head structure that is nccdcd in order to realize more high density recording as IrMn shaws high H,, at lhinnrr layer thicknrss than ordered antiferromagnetic films as NiMn and PtMn". However, other papers have reporled poor IrMn properties with a T. ofbelow 250'C ",". In this study. we report the relation ktwccn lrMn crystal gram and good lrMn propertics and thc thermal stability of spin-valves with a synthetic antiferromagnet ( S y w exchange-biased by the IrMn layer. -E.&.I ' Im We believe that large KnFV is important to obtain high T. (Here, Ks is the crystal anisotropy 01 the antiferromagnetic film, and V i s the volume of the crystal grain. Namely. it is needed to make the grain size of lrMn layer grow in order lo obtain high Tw On the other hand, it was reported for CrAl antiferomagntic layer that H, is in proportion to l l D by using Malozemolf random field approximation on the assumplion that L=D ?.(Here, L is the coupling arei, and D is the grain size.) As the critical thickness for CrAl is thick, it is necessary to assume d-nD (n: cocilicienl) for lrMn with thin critical thickness. If these models are suitable, it is thought that T. increases when the grain size of IrMn layer grows lager, while H,,,dccrcascs. Figure 1 shows the grain six of lrMn layer dcpcndencc for H , , and T,. The grain size was calculatcd by using Schcrrur'a cquation from IrMn (111) XRD peak. The grain sizes were ahout equal to the lrMn layer thickness. I t was found lhal T, increases as the grain size of lrMn layer increases, while H, .decreases, and an H,, of 4WOe at R.T. and a T, o1300'C for CoFc(2nm)llrMn (10nm) spin-valves were obtained. Thermal stahilitv and reliahilitv of SvAFIlrMn spin-wilvcs The spin-valve (S.V.) film wilh a SyAF exchange-biased by the IrMn layer with high T, and high H, TalNiFelCoFelCulCoFe~ulC~~Fellr?,Mn,,(l0nm)~a, was prupared on alumina coalcd Si substrates hy DC sputtering. The IOW oxygen contcnl lrMn largcl was uscd. The lilms were annealed at 270'C for 1 -10 hours under a magnetic licld olmore Ihan 7kOe. Figure 2 shows the thermal stability fnr a reversed magnetic ticld n l 10kOe IO the pinncd layer direction. At uach temperature, it was annealed f<>r 10 minutes under the rcvcrscd m;ignclic licld. The H,.,' was defined as shown in fig.3. The pinned direction was stable ti l l about I X W C . And Ihc pinncd direction gradually changed to Ihc reversed direction a1 tcmpcralurcs i r m 201K 10 ahout 311o'C. I t is thought tu be more stahlc h r reversed magnetic liclds til l 24OT than IrMn-S.V. and PtMnS.V. with normal pinned layer. The spin-valve film wilh a SyAF exchange-biased h) Ihc lrMn layer is expccled to he strong lor ESD. Figure 4 shows thc lhcmal stahilily Ihr ii pcrpcndicular miignclic field of 2000e to pinned direclion. The time dependence of the pin dircclim 0 11 was mcasurcd ;it 200°C. SyAFllrMn spin-valve shrrws a small changc in e p u l l c s s than 4' aftcr ahnut 1110 hours even at a high temperature of200t . TEL: +81-(144-54Y-3572 FAX: t X 1 -(144-54O-l 142 Hiromi Niu Fuke Materials and Devices Rescarch hhoratnrics, Rescarch and Development Center. Toshiba Corpralinn 72, Horikawa-cho, Saiwai-ku, Kawasaki 210, Japan E-mail: hiromi.iukc~toshiba.uo.jp