带温度控制电路的电热微系统系统级模型

2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems Pub Date : 2011-04-18 DOI:10.1109/ESIME.2011.5765756

T. Bechtold, E. Rudnyi, D. Hohlfeld

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引用次数: 5

摘要

在本文中，我们展示了一个基于微热板降阶模型的温控微系统的系统级仿真。与电热微结构一起，我们实施了一种控制方案，该方案允许热板在独立于环境温度的指定设定值下运行，或者遵循指定的温度扫描。采用优化算法对pi控制器进行参数辨识。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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System-level model of electrothermal microsystem with temperature control circuit

In this paper we demonstrate a system-level simulation of a temperature controlled microsystem which is based on a reduced order model of a micro hotplate. Together with the electro-thermal microstructure we have implemented a control scheme, which allows the hotplate to operate either at a defined setpoint independent of ambient temperature or to follow defined temperature sweeps. An optimization algorithm was employed to identify suitable parameters for a PI-controller.

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来源期刊

2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems

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