{"title":"电容式MOS气体传感器的设计与仿真","authors":"Bedabrata Biswas, F. Talukdar, G. S. Baghel","doi":"10.1109/SILCON55242.2022.10028834","DOIUrl":null,"url":null,"abstract":"The resistive Metal oxide semiconductor (MOS) type gas sensor has limitations like low selectivity, low sensitivity, high temperature, and high-power consumption. To resolve these problems, a capacitive gas sensor is introduced in this paper. The sensor is designed carefully by taking care of the fringing field effect. The mathematical modeling of the equivalent circuit of the sensor has been shown. The gas sensing setup has been explained in detail. Finally, the model is simulated in MATLAB and COMSOL.","PeriodicalId":183947,"journal":{"name":"2022 IEEE Silchar Subsection Conference (SILCON)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-11-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Design and Simulation of a Capacitive MOS Gas Sensor\",\"authors\":\"Bedabrata Biswas, F. Talukdar, G. S. Baghel\",\"doi\":\"10.1109/SILCON55242.2022.10028834\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The resistive Metal oxide semiconductor (MOS) type gas sensor has limitations like low selectivity, low sensitivity, high temperature, and high-power consumption. To resolve these problems, a capacitive gas sensor is introduced in this paper. The sensor is designed carefully by taking care of the fringing field effect. The mathematical modeling of the equivalent circuit of the sensor has been shown. The gas sensing setup has been explained in detail. Finally, the model is simulated in MATLAB and COMSOL.\",\"PeriodicalId\":183947,\"journal\":{\"name\":\"2022 IEEE Silchar Subsection Conference (SILCON)\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-11-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2022 IEEE Silchar Subsection Conference (SILCON)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SILCON55242.2022.10028834\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2022 IEEE Silchar Subsection Conference (SILCON)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SILCON55242.2022.10028834","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Design and Simulation of a Capacitive MOS Gas Sensor
The resistive Metal oxide semiconductor (MOS) type gas sensor has limitations like low selectivity, low sensitivity, high temperature, and high-power consumption. To resolve these problems, a capacitive gas sensor is introduced in this paper. The sensor is designed carefully by taking care of the fringing field effect. The mathematical modeling of the equivalent circuit of the sensor has been shown. The gas sensing setup has been explained in detail. Finally, the model is simulated in MATLAB and COMSOL.
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