Mechanical Oscillators Based on Superconducting Membranes

Mechanical oscillators can be implemented to store and/or transfer information. In order to couple a mechanical oscillator to a superconducting qubit, we fabricate a superconducting capacitor using the diluted photoresist or electron beam photoresist as a sacrificial layer. The upper plate of the capacitor, a suspended membrane, acts as a mechanical oscillator. We obtain its mechanical resonant frequency and response to the input microwave. Such mechanical oscillator can be used as the capacitor of a superconducting qubit to form a coupled system. Another way to transfer information between a mechanical oscillator and a superconducting qubit is to take advantage of a superconducting microwave resonator such as a coplanar waveguide resonator. In order to control the resonant frequency of the resonators, we introduce a DC voltage bias between the upper and lower plates of the capacitor. We demonstrate the dependence of the resonant frequency on the applied DC voltage.