用于微波应用的高调谐范围MEMS电容器

2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems Pub Date : 2009-11-01 DOI:10.1109/COMCAS.2009.5386051

E. David, T. Zlotnikov, L. Gal, O. Lavie, Y. Nemirovsky

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引用次数: 3

摘要

本文提出了一种新型的20GHz MEMS梳状结构可变电容器，其特点是电容调谐范围为200%，同时避免了通过弹簧产生的不必要的耦合。这种新型变容器由三个梳状结构组成，其中两个固定在衬底上，而第三个将两个固定结构电容耦合，是可移动的，悬浮在机械弹簧上。这种新设计将机械机构与射频电容器分离，并允许对两者进行独立的优化设计。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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High tuning range MEMS capacitor for microwave applications

This paper presents a novel MEMS comb-structured variable capacitor at 20GHz that features a wide capacitance tuning range of 200%, yet avoids unwanted coupling through the springs. This new varactor consists of three comb structures — two of which are anchored to the substrate, while the third, which capacitively couples the two anchored ones, is movable, suspended on mechanical springs. This new design decouples the mechanical mechanism from the RF capacitor and allows an independent optimal design of the two.

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来源期刊

2009 IEEE International Conference on Microwaves, Communications, Antennas and Electronics Systems

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