基于Al金属反射镜的MEMS FP OTF有限元模拟

2008 5th IFIP International Conference on Wireless and Optical Communications Networks (WOCN '08) Pub Date : 2008-05-05 DOI:10.1109/WOCN.2008.4542505

N. Ngajikin, G. Witjaksono, N. Kassim, A. .. Mohammad

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引用次数: 3

摘要

MEMS Fabry Perot光可调谐滤波器(FP OTF)广泛应用于波分复用。该装置大多采用DBR反射镜来实现高反射率。然而，这种反射镜的使用将增加MEMS FP OTF制造的成本和复杂性。一些应用只需要最小的带宽，它只需要95%的镜像反射率。这可以用金属反射镜来实现。金属反射镜的使用降低了MEMS FP OTF制造工艺的复杂性。为此，利用CoventorWare 2006软件建立了Al金属反射镜MEMS FP OTF的有限元仿真模型，研究了其在1200nm ~ 1600nm波长范围内的光强和输出光谱性能。Al薄膜的厚度从100nm变化到1000nm来研究吸光度，A为一片无衬底的金属薄膜反射镜。分别采用LAI =200nm和LAI =500nm铝薄膜制备了MEMS FP OTF，并利用covenor Ware2006软件进行了仿真。从透光率、自由光谱范围(FSR)和带宽(FWHM)三个方面对结果进行了分析。

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FEM simulation on MEMS FP OTF using Al metallic mirror

MEMS Fabry Perot Optical Tunable Filter (FP OTF) is widely used in WDM application. Most of this device is developed using DBR mirror in order to achieve high reflectivity. However, the usage of this mirror will increase the cost and complexity of MEMS FP OTF fabrication. Some application requires minimal bandwidth where it needs only 95% mirror reflectivity. This can be achieved using metallic mirror. The usage of metallic mirror reduces the complexity of MEMS FP OTF fabrication process. Therefore, FEM simulation model for MEMS FP OTF using Al metallic mirror is developed using CoventorWare 2006 software in order to investigate the performance in terms of optical Intensity and output spectrum within 1200nm to 1600nm wavelength range. Thickness of Al thin film is varied from 100nm to 1000nm to investigate the absorbance, A for a slice of metallic thin film mirror without substrate. MEMS FP OTF using LAI;=200nm and LAI;=500nm Al thin film are developed and simulated using Coventor Ware2006 software. Results are analyzed in terms of transmittivity, Free spectral Range (FSR) and Bandwidth (FWHM).

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来源期刊

2008 5th IFIP International Conference on Wireless and Optical Communications Networks (WOCN '08)

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