用激光微设备实现增量圆形网络掩模的实验室研究

G. Gheorghe
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引用次数: 0

摘要

本文介绍了利用激光微设备和专用软件实现光电增量辐射掩模的研究成果。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Laboratory researches for realizing incremental circular networks masks with laser micro-equipments
The paper presents the results of researches undertaken in the domain of realizing photoelectric incremental radial masks by generating them with laser micro-equipments and special dedicated software.
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