{"title":"金属的脉冲激光烧蚀:热扩散在纳秒-飞秒范围内的相对重要性比较","authors":"D. Kapitan, D. Coutts, C. Webb","doi":"10.1109/CLEOE.1998.719458","DOIUrl":null,"url":null,"abstract":"In recent years numerous reports on pulsed laser ablation of metals using various laser sources have fostered the discussion regarding the limitations due to thermal diffusion to produce feature sizes on (sub-)micron scale smaller than the diffusion length. Particularly in the light of novel micromachining applications, the relative benefits of using pulsed nanosecond (ns) lasers in the visible, such as copper vapour lasers and frequency doubled Nd:YAG, versus femtosecond (fs) Ti:Sapphire lasers operating in the infrared, remains debatable.","PeriodicalId":404067,"journal":{"name":"CLEO/Europe Conference on Lasers and Electro-Optics","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-09-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"On Pulsed Laser Ablation of Metals: Comparing the Relative Importance of Thermal Diffusion in the Nanosecond - Femtosecond Regime\",\"authors\":\"D. Kapitan, D. Coutts, C. Webb\",\"doi\":\"10.1109/CLEOE.1998.719458\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In recent years numerous reports on pulsed laser ablation of metals using various laser sources have fostered the discussion regarding the limitations due to thermal diffusion to produce feature sizes on (sub-)micron scale smaller than the diffusion length. Particularly in the light of novel micromachining applications, the relative benefits of using pulsed nanosecond (ns) lasers in the visible, such as copper vapour lasers and frequency doubled Nd:YAG, versus femtosecond (fs) Ti:Sapphire lasers operating in the infrared, remains debatable.\",\"PeriodicalId\":404067,\"journal\":{\"name\":\"CLEO/Europe Conference on Lasers and Electro-Optics\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1998-09-14\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"CLEO/Europe Conference on Lasers and Electro-Optics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CLEOE.1998.719458\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"CLEO/Europe Conference on Lasers and Electro-Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOE.1998.719458","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
On Pulsed Laser Ablation of Metals: Comparing the Relative Importance of Thermal Diffusion in the Nanosecond - Femtosecond Regime
In recent years numerous reports on pulsed laser ablation of metals using various laser sources have fostered the discussion regarding the limitations due to thermal diffusion to produce feature sizes on (sub-)micron scale smaller than the diffusion length. Particularly in the light of novel micromachining applications, the relative benefits of using pulsed nanosecond (ns) lasers in the visible, such as copper vapour lasers and frequency doubled Nd:YAG, versus femtosecond (fs) Ti:Sapphire lasers operating in the infrared, remains debatable.