金属的脉冲激光烧蚀:热扩散在纳秒-飞秒范围内的相对重要性比较

D. Kapitan, D. Coutts, C. Webb
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引用次数: 5

摘要

近年来,许多关于使用各种激光源的脉冲激光烧蚀金属的报道促进了关于热扩散产生小于扩散长度的(亚)微米尺度特征尺寸的限制的讨论。特别是在新的微加工应用中,在可见光下使用脉冲纳秒(ns)激光器(如铜蒸气激光器和倍频Nd:YAG)与在红外下使用飞秒(fs) Ti:Sapphire激光器的相对优势仍然存在争议。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
On Pulsed Laser Ablation of Metals: Comparing the Relative Importance of Thermal Diffusion in the Nanosecond - Femtosecond Regime
In recent years numerous reports on pulsed laser ablation of metals using various laser sources have fostered the discussion regarding the limitations due to thermal diffusion to produce feature sizes on (sub-)micron scale smaller than the diffusion length. Particularly in the light of novel micromachining applications, the relative benefits of using pulsed nanosecond (ns) lasers in the visible, such as copper vapour lasers and frequency doubled Nd:YAG, versus femtosecond (fs) Ti:Sapphire lasers operating in the infrared, remains debatable.
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