激光辅助原子探针:非金属材料的分析

2006 19th International Vacuum Nanoelectronics Conference Pub Date : 2006-07-17 DOI:10.1109/IVNC.2006.335422

M. Gilbert, B. Deconihout

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摘要

本文报道了激光辅助原子探针技术，该技术与传统的原子探针分析不同，它使用超快的亚纳秒激光脉冲代替电蒸发脉冲。该方法被证明在分析氧化型材料如锰、超导体，甚至在高电阻硅的导电相中都是有利的

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Laser Assisted Atom Probe: Toward the Analyze of Non-Metallic Material

Laser assisted atom probe technique is reported which differs from the conventional atom probe analysis in the use of ultra fast sub nanosecond laser pulses instead of electrical evaporation pulsed. This method proves to be advantageous in analyzing oxide type materials like manganites, superconductors and even in the conducting phase of highly resistant silicon

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2006 19th International Vacuum Nanoelectronics Conference

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