Multi Subband Deterministic Simulation of an Ultra-thin Double Gate MOSFET with 2D Electron Gas

We present a self-consistent multi subband deter- ministic solver of the Boltzmann transport equation of the two dimensional (2D) electron gas. The Sch¨ odinger equation at each slice in the confinement direction and the two dimensional Poisson equation are self-consistently solved with the Boltzmann transport equation. The energy quantization and the scattering of the 2D electron gas are included. We apply this solver to an ultra-thin body double gate MOSFET and show the influence of the 2Dk scattering to the electron transport.