飞秒激光烧蚀钛和硅

Mengqi Ye, C. Grigoropoulos
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引用次数: 0

摘要

通过飞行时间(TOF)、发射光谱和显微测量研究了钛和硅样品的飞秒激光烧蚀。利用钛蓝宝石飞秒激光系统在λ = 800 nm处输出约100 fs (FWHM)的激光脉冲。建立了一个基压为10−7 torr的真空室,用于离子TOF的测量。这些离子TOF光谱被用来确定喷射离子的速度分布。纳秒激光烧蚀通常产生几十eV的离子,而飞秒激光照射即使在中等能量密度下也能产生能量高达几keV的高能离子。这些快离子最可能的能量与激光能量成正比。TOF光谱的结构和峰数随激光辐照强度的变化而变化。利用增强型CCD (ICCD)相机拍摄了羽流发射图像。用光谱仪分析了羽流发射光谱。采用干涉显微镜和扫描电镜对激光烧蚀后的弹坑进行了测量。烧蚀率表示为激光能量和射次的函数。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Femtosecond Laser Ablation of Titanium and Silicon
Femtosecond laser ablation of titanium and silicon samples has been studied via time-of-flight (TOF), emission spectroscopy and microscopy measurement. Laser pulses of around 100 fs (FWHM) at λ = 800 nm were delivered by a Ti:sapphire femtosecond laser system. A vacuum chamber with a base pressure of 10−7 torr was built for ion TOF measurement. These ion TOF spectra were utilized to determine the velocity distribution of the ejected ions. While nanosecond laser ablation typically generates ions of a few tens of eV, femtosecond laser irradiation even at moderate energy densities can produce energetic ions with energies of up to a few keV. The most probable energy of these fast ions is proportional to the laser fluence. The structure and number of peaks of the TOF spectra varies with the laser fluence. Images of plume emission were captured by an intensified CCD (ICCD) camera. The plume emission spectrum was analyzed by a spectrometer. Laser ablated craters were measured by an interferometric microscope and a scanning electron microscope (SEM). Ablation yield was expressed as a function of laser fluence, and number of shots.
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