基于TCAD的22nm FinFET结构设计与仿真

R. Kalaivani, J. Pravin, S. Ashok Kumar, R. Sridevi
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引用次数: 4

摘要

FINFET的概念是为了提高VLSI优化电路的功率和性能。FINFET是未来技术的基础,因为它的功率利用率,性能,可扩展性和更好的控制短通道效应。本文利用TCAD工具分析了采用Hfo2介质材料的FINFET的工作原理。采用高K介电材料Hf02优化了电路的漏极电流。结果表明,采用不同的栅极功函数(4.2ev ~ 4.6ev)对器件性能有较大的改善。更好的器件结构必将成为高优化器件的解决方案
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Design and Simulation of 22nm FinFET Structure Using TCAD
The FINFET concept is reviewed for the enhancement of power and performance in the VLSI Optimizing circuit .FINFET is the basics for upcoming technologies because of its power utilization, performance, scalability and better control in the short channel effects. In this paper the working of FINFET is analyzed using Hfo2 dielectric material by using TCAD tool. Drain current in the circuits are optimized by using high K dielectric material Hf02. The result shows that the improvement in the device performance by using various gate work function (4.2ev to 4.6ev). Better device Structure will surely be the solution for high optimizing devices
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