基于多层SiN/SiO平台的高效端射三维光学相控阵

2021 IEEE Photonics Society Summer Topicals Meeting Series (SUM) Pub Date : 2021-07-01 DOI:10.1109/SUM48717.2021.9505943

Dachuan Wu, Y. Yi

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引用次数: 0

摘要

OPA器件在固态激光雷达中得到了广泛的研究。我们研究了一种多层sino /SiO结构，可以高效地端射光束。讨论了该结构的优点、仿真结果和制造的可行性。此外，还介绍了最新的制造进展。

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High efficiency end-fire 3-D optical phased array based on multi-layers SiN/SiO platform

OPA device has been widely studied for solid-state Lidar. We have investigated a multi-layers SiN/SiO structure to end-fire the beam with high efficiency. The advantage of the structure, simulation result and fabrication feasibility are discussed. In addition, the latest fabrication progress is also presented.

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2021 IEEE Photonics Society Summer Topicals Meeting Series (SUM)

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