0.5(BaZr0.2Ti0.8O3)-0.5(Ba0.7Ca0.3O3)薄膜来源于绿色溶胶-凝胶途径

2019 IEEE 8th International Workshop on Advances in Sensors and Interfaces (IWASI) Pub Date : 2019-06-01 DOI:10.1109/IWASI.2019.8791305

P. Barbato, P. Aprea, D. Caputo, V. Casuscelli, R. Scaldaferri, A. Matteo

{"title":"0.5(BaZr0.2Ti0.8O3)-0.5(Ba0.7Ca0.3O3)薄膜来源于绿色溶胶-凝胶途径","authors":"P. Barbato, P. Aprea, D. Caputo, V. Casuscelli, R. Scaldaferri, A. Matteo","doi":"10.1109/IWASI.2019.8791305","DOIUrl":null,"url":null,"abstract":"Lead-free piezoelectric thin films made of 0.5(BaZr<inf>0.2</inf>Ti<inf>0.8</inf>O<inf>3</inf>)-0.5(Ba<inf>0.7</inf>Ca<inf>0.3</inf>O<inf>3</inf>) over Pt/TiO<inf>x</inf>/SiO<inf>2</inf>/Si were synthesized by means of repeated \"green\" chemical solution deposition routes with the use of non-toxic solvents. Characterization results of the morphology and ferroelectric behavior of the films are reported.","PeriodicalId":330672,"journal":{"name":"2019 IEEE 8th International Workshop on Advances in Sensors and Interfaces (IWASI)","volume":"21 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"0.5(BaZr0.2Ti0.8O3)-0.5(Ba0.7Ca0.3O3) thin films deriving from green sol-gel routes\",\"authors\":\"P. Barbato, P. Aprea, D. Caputo, V. Casuscelli, R. Scaldaferri, A. Matteo\",\"doi\":\"10.1109/IWASI.2019.8791305\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Lead-free piezoelectric thin films made of 0.5(BaZr<inf>0.2</inf>Ti<inf>0.8</inf>O<inf>3</inf>)-0.5(Ba<inf>0.7</inf>Ca<inf>0.3</inf>O<inf>3</inf>) over Pt/TiO<inf>x</inf>/SiO<inf>2</inf>/Si were synthesized by means of repeated \\\"green\\\" chemical solution deposition routes with the use of non-toxic solvents. Characterization results of the morphology and ferroelectric behavior of the films are reported.\",\"PeriodicalId\":330672,\"journal\":{\"name\":\"2019 IEEE 8th International Workshop on Advances in Sensors and Interfaces (IWASI)\",\"volume\":\"21 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 IEEE 8th International Workshop on Advances in Sensors and Interfaces (IWASI)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IWASI.2019.8791305\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE 8th International Workshop on Advances in Sensors and Interfaces (IWASI)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IWASI.2019.8791305","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

在Pt/TiOx/SiO2/Si上，采用重复“绿色”化学溶液沉积方法，使用无毒溶剂合成了0.5(BaZr0.2Ti0.8O3)-0.5(Ba0.7Ca0.3O3)无铅压电薄膜。报道了薄膜的形貌和铁电性能的表征结果。

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0.5(BaZr0.2Ti0.8O3)-0.5(Ba0.7Ca0.3O3) thin films deriving from green sol-gel routes

Lead-free piezoelectric thin films made of 0.5(BaZr0.2Ti0.8O3)-0.5(Ba0.7Ca0.3O3) over Pt/TiOx/SiO2/Si were synthesized by means of repeated "green" chemical solution deposition routes with the use of non-toxic solvents. Characterization results of the morphology and ferroelectric behavior of the films are reported.

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2019 IEEE 8th International Workshop on Advances in Sensors and Interfaces (IWASI)

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