基于分布式光纤传感的实时翘曲变形监测

International Conference on Precision Instruments and Optical Engineering Pub Date : 2023-02-27 DOI:10.1117/12.2668453

Shun Liu, P. Zhu, Zhecong Lin, Yabin Zhou, M. Soto

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引用次数: 0

摘要

采用分布式光纤对硅板的翘曲变形进行了实时监测，研究了数据分辨率对测量结果的影响。实验结果表明，该方法具有较好的精度，且数据分辨率与测量误差之间呈非线性关系。

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Real-time warpage deformation monitoring using distributed optical fiber sensing

The warpage deformation of a silicon plate is monitored in real-time using distributed optical fiber and the influence of data resolution on the measurement result is studied. The experimental results show that this method has good accuracy and the relationship between data resolution and measurement error is non-linear.

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International Conference on Precision Instruments and Optical Engineering

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