{"title":"相位厚度偏差对近红外探测器增透涂层性能的影响","authors":"B. Gyoch, P. Mashkov, Stanislav Penchev","doi":"10.1109/ISSE.2012.6273094","DOIUrl":null,"url":null,"abstract":"Investigation deals with problems of computer-aided design of wide-band antireflection (AR) coatings for semiconductor photosensitive devices (discrete photo receivers, CCD-cameras, modern security systems and others) for spectral region 0.9 μm - 1.7 μm. In practice during deposition of multilayer coatings some deviations of desired coatings' thicknesses always occurs which worsens antireflection properties of the coatings. It is important to know how the phase thickness deviations influence on transmission spectrum of the system: substrate - AR coating. As a result of the analysis it is shown that six-layer structure possesses the lowest reflection and high stability when phase thickness deviations' occurs.","PeriodicalId":277579,"journal":{"name":"2012 35th International Spring Seminar on Electronics Technology","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2012-05-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Phase thickness deviations' influence on properties of antireflection coatings for near infrared detectors\",\"authors\":\"B. Gyoch, P. Mashkov, Stanislav Penchev\",\"doi\":\"10.1109/ISSE.2012.6273094\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Investigation deals with problems of computer-aided design of wide-band antireflection (AR) coatings for semiconductor photosensitive devices (discrete photo receivers, CCD-cameras, modern security systems and others) for spectral region 0.9 μm - 1.7 μm. In practice during deposition of multilayer coatings some deviations of desired coatings' thicknesses always occurs which worsens antireflection properties of the coatings. It is important to know how the phase thickness deviations influence on transmission spectrum of the system: substrate - AR coating. As a result of the analysis it is shown that six-layer structure possesses the lowest reflection and high stability when phase thickness deviations' occurs.\",\"PeriodicalId\":277579,\"journal\":{\"name\":\"2012 35th International Spring Seminar on Electronics Technology\",\"volume\":\"1 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2012-05-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2012 35th International Spring Seminar on Electronics Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ISSE.2012.6273094\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2012 35th International Spring Seminar on Electronics Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISSE.2012.6273094","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Phase thickness deviations' influence on properties of antireflection coatings for near infrared detectors
Investigation deals with problems of computer-aided design of wide-band antireflection (AR) coatings for semiconductor photosensitive devices (discrete photo receivers, CCD-cameras, modern security systems and others) for spectral region 0.9 μm - 1.7 μm. In practice during deposition of multilayer coatings some deviations of desired coatings' thicknesses always occurs which worsens antireflection properties of the coatings. It is important to know how the phase thickness deviations influence on transmission spectrum of the system: substrate - AR coating. As a result of the analysis it is shown that six-layer structure possesses the lowest reflection and high stability when phase thickness deviations' occurs.
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