T. Beauchêne, D. Lewis, P. Perdu, F. Beaudoin, P. Fouillat, A. Touboul
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ESD defect localisation using photovoltaic laser stimulation techniques: optimization and interpretation
Alternative localization techniques to classical methods such as liquid crystal or photoemission microscopes (PEM) are studied. The aim of this article is to illustrate the suitability of Optical Beam Induced Current (OBIC) methods to accurately localize and analyze ESD defects, and to provide a global OBIC methodology.