AlGaN/AlN/GaN/AlGaN基器件的自热和极化效应

K. Ahmeda, B. Ubochi, K. Kalna, B. Benbakhti, S. Duffy, W. Zhang, A. Soltani
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引用次数: 4

摘要

在源漏距离一定比例的Al0.32Ga0.68N/AlN/GaN/Al0.1Ga0.9N传输线模型(TLM)中,研究了自热和极化的相互作用对电流的影响。该研究基于使用电热模型对I-V实验特性进行精心校准的TCAD模拟。电热模拟表明,由于大电场影响器件可靠性,漏极触点边缘存在热点。由于外加电应力的作用,当源极到漏极的距离减小到12pm、8pm和4pm时,总极化相对于18pm异质结构分别减少了7%、10%和17%,这是由于电应力引起的额外应变。由于反向压电效应,源/漏触点上的额外应力减少了表面的极化。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Self-heating and polarization effects in AlGaN/AlN/GaN/AlGaN based devices
The interplay of self-heating and polarization affecting the current is studied in Al0.32Ga0.68N/AlN/GaN/Al0.1Ga0.9N Transmission Line Model (TLM) heterostructures with a scaled source-drain distance. The study is based on meticulously calibrated TCAD simulations against I-V experimental characteristics using an electro-thermal model. The electro-thermal simulations show hot-spots at the edge of the drain contact due to a large electric field affecting the device reliability. Due to the applied electrical stress, the total polarization, relative to the 18 pm heterostructure, decreases by 7 %, 10 % and 17% during a reduction of the source-to-drain distance to the 12 pm, 8 pm, and 4 pm, respectively, as a result of the additional strain induced by electrical stress. This additional stress on source/drain contacts reduces the polarization at the surface as a result of the inverse piezoelectric effect.
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