Design and simulation of piezoelectric PZT micro-actuators with integrated piezoresistive displacement sensors for micro-optics applications

This paper presents the design and simulation of a novel piezoelectric actuator integrated with on-chip piezoresistive sensors for micro-lens actuation. COMSOL Multiphysics is used to perform and facilitate the design and simulation. The actuator consists of eight d31 mode unimorph piezoelectric actuators symmetrically attached to a lens holding frame through springs at one end, and to the silicon substrate at the other end. Diffused p-Si piezoresistors with doping of 1x1018cm-3 are considered in the proposed design for displacement sensing of each micro-actuator. Results shows 3.2μm/V displacement sensitivity for the micro-lens actuator and piezoresistive sensitivity of 0.134mV/V/μm is obtainable with p-Si piezoresistors.