基于Simulink的ICP大功率射频电源设计与仿真

2020 IEEE 3rd International Conference on Electronic Information and Communication Technology (ICEICT) Pub Date : 2020-11-13 DOI:10.1109/ICEICT51264.2020.9334370

Yang Zhou, Xuesong Xie, Xiaoling Zhang, Kunkun Huang

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引用次数: 1

摘要

为了设计大功率电感耦合等离子体射频电源并验证其正确性，在Simulink中搭建了E类功率放大电路和阻抗自动匹配电路。结果分析表明，本文构建的E类功率放大器能够满足设计要求，阻抗匹配算法可以通过调整匹配网络元件的值来实现阻抗匹配的最大功率输出。基于Simulink的仿真电路模拟了ICP运行过程中负载的变化，验证了功率放大器设计和匹配算法的正确性。

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Design and simulation of high-power RF power supply for ICP based on Simulink

In order to design a high-power ICP (Inductive Coupled Plasma) RF power supply and verify its correctness, a class E power amplifier circuit and an automatic impedance matching circuit are built in Simulink. The analysis of the results shows that the Class E power amplifier built in this paper can meet the design requirements, and the impedance matching algorithm can achieve the maximum power output of impedance matching by adjusting the value of the matching network components. This simulation circuit based on Simulink simulates the load changes during ICP operation to verify the correctness of the power amplifier design and matching algorithm.

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2020 IEEE 3rd International Conference on Electronic Information and Communication Technology (ICEICT)

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