环境稳定的铱反射涂层用于红外光谱范围

T. Döhring, M. Stollenwerk, Paul Schmitt, A. Szeghalmi
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摘要

高反射金属涂层是许多光学元件必不可少的。现有的由银(Ag)和金(Au)制成的镜面涂层在红外(IR)光谱范围内提供高且宽带的自反射,但如果没有合适的保护层,则容易受到环境影响和机械应力的影响。特别是在长波长光谱范围内,这些保护层的吸收带又部分地降低了高镜面反射率。然而,贵金属铱(Ir)坚硬,密度极高,在热、机械和化学上都很稳定。与银和金一样,铱在中红外(MIR)和远红外(FIR)光谱范围内具有类似的高反射率,并且即使没有保护层,也能对环境影响具有很高的抵抗力。本文介绍了原子层沉积法(ALD)和磁控溅射法(MS)制备铱反射膜的不同沉积工艺及其光学性能和结构性能,并进行了比较。在200 nm ~ 20 μm波长范围内测定了ALD和MS沉积铱反射膜的复折射率,与已有的文献值相补充。我们证明了铱镜面涂层在中远红外光谱范围内提供了高和宽带的反射率。与已建立的受保护的银和金镜面涂层相比,铱涂层即使没有保护层,也具有环境耐用性和高达600°C的热稳定性。因此,作为一种有趣的镜面涂层材料,铱在红外天文学和工业仪器上有特殊应用的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Environmentally stable iridium mirror coatings for the infrared spectral range
Highly reflective metal coatings are essential for numerous optical elements. Established mirror coatings made of silver (Ag) and gold (Au) offer high and broadband self-reflection in the infrared (IR) spectral range but are susceptible to environmental influences and mechanical stress without suitable protective layers. In the long-wavelength spectral range, in particular, the absorption bands of these protective layers partially reduce the high mirror reflectivity again. However, the noble metal iridium (Ir) is hard, extremely dense, and thermally, mechanically, and chemically stable. Iridium provides a similarly high reflectivity in the mid (MIR) and far-infrared (FIR) spectral range, as silver and gold, and high resistance to environmental influences - even without protective layers. In this paper, the different deposition processes, as well as the optical and structural properties of iridium mirror coatings fabricated by atomic layer deposition (ALD) and by magnetron sputtering (MS), are presented and compared with each other. The complex refractive indices for ALD and MS deposited iridium mirror coatings were determined for wavelengths from 200 nm to 20 μm, complementing the existing literature values. We demonstrate that iridium mirror coatings offer a high and broadband reflectivity from the mid to far-infrared spectral range. In contrast to established – protected – silver and gold mirror coatings, the iridium coatings are environmentally durable and thermally stable up to 600°C, even without protective layers. Therefore, as an interesting mirror coating material, iridium has the potential for special applications in infrared astronomy and probably also for industrial instruments.
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