氙、氯及其混合物中电子能量弛豫长度

PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON ADVANCES AND APPLICATIONS IN PLASMA PHYSICS (AAPP 2019) Pub Date : 2019-11-26 DOI:10.1063/1.5135480

A. P. Golovitskii

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引用次数: 1

摘要

本文推导了几种气体混合(惰性气体和分子气体)中压辉光放电等离子体电子能量弛豫长度的简单分析方法。这使得能够先验地评价所述放电等离子体中电子能量分布函数的局部性程度。本文给出了一种不含汞的强效准分子紫外灯在Xe和Cl2混合物中辉光放电的评价实例。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Electron energy relaxation length in xenon, chlorine and their mixture

The simple analytic method for evaluation of relaxation length of electron energy has been derived for plasma of moderate pressure glow discharge in the mixture of several gases – it may be both inert and molecular gases. This enables to evaluate a priori the degree of locality of electron energy distribution function in plasma of said discharges. An example of such evaluation for an powerful excimer UV lamp containing no mercury with the glow discharge in a mixture of Xe and Cl2 is presented.

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来源期刊

PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON ADVANCES AND APPLICATIONS IN PLASMA PHYSICS (AAPP 2019)

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