{"title":"一种新型涡流无线圈洛伦兹力二维扫描镜","authors":"Hsueh-An Yang, W. Fang","doi":"10.1109/MEMSYS.2006.1627914","DOIUrl":null,"url":null,"abstract":"This paper reports a novel micro scanning mirror driven by coil-less Lorentz force using eddy current. The eddy current is easily induced in ferromagnetic material like Nickel by solenoid. Thus, the complicated coil routing and insulation layer deposition for current is prevented. Moreover, the fabrication is simplified and easy to integrate with micromachining and CMOS processes. In application, this study demonstrated a bulk micromachined 2D scanning mirror with 20 mechanical scan angles when operated at 100mV and 0.016mA.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"A Novel Coil-Less Lorentz Force 2D Scanning Mirror Using Eddy Current\",\"authors\":\"Hsueh-An Yang, W. Fang\",\"doi\":\"10.1109/MEMSYS.2006.1627914\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper reports a novel micro scanning mirror driven by coil-less Lorentz force using eddy current. The eddy current is easily induced in ferromagnetic material like Nickel by solenoid. Thus, the complicated coil routing and insulation layer deposition for current is prevented. Moreover, the fabrication is simplified and easy to integrate with micromachining and CMOS processes. In application, this study demonstrated a bulk micromachined 2D scanning mirror with 20 mechanical scan angles when operated at 100mV and 0.016mA.\",\"PeriodicalId\":250831,\"journal\":{\"name\":\"19th IEEE International Conference on Micro Electro Mechanical Systems\",\"volume\":\"14 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2006-05-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"19th IEEE International Conference on Micro Electro Mechanical Systems\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2006.1627914\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"19th IEEE International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2006.1627914","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A Novel Coil-Less Lorentz Force 2D Scanning Mirror Using Eddy Current
This paper reports a novel micro scanning mirror driven by coil-less Lorentz force using eddy current. The eddy current is easily induced in ferromagnetic material like Nickel by solenoid. Thus, the complicated coil routing and insulation layer deposition for current is prevented. Moreover, the fabrication is simplified and easy to integrate with micromachining and CMOS processes. In application, this study demonstrated a bulk micromachined 2D scanning mirror with 20 mechanical scan angles when operated at 100mV and 0.016mA.
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